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Development and applications of electron beam ion source for nanoprocesses
Sakurai, M; Tona, M; Watanabe, H; Nakamura, Nobuyuki; Ohtani, Shunsuke
; et al.
Journal of Physics: Conference Series; Bristol Vol. 163, Iss. 1, (Apr 2009).
DOI:10.1088/1742-6596/163/1/012115
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