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High-k Gate Dielectric Films Studied by Extremely Asymmetric X-ray Diffraction and X-ray Photoelectron Spectroscopy
Ito, Yuki; Akimoto, Koichi; Yoshida, Hironori; Emoto, Takashi; Kobayashi, Daisuke
; et al.
Journal of Physics: Conference Series; Bristol Vol. 83, Iss. 1, (Oct 2007).
DOI:10.1088/1742-6596/83/1/012011
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