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Abstract
Cavity optomechanical systems enable interactions between light and mechanical resonators, providing a platform both for fundamental physics of macroscopic quantum systems and for practical applications of precision sensing. The resonant enhancement of both mechanical and optical response in the cavity optomechanical systems has enabled precision sensing of multiple physical quantities, including displacements, masses, forces, accelerations, magnetic fields, and ultrasounds. In this article, we review the progress of precision sensing applications using cavity optomechanical systems. The review is organized in the following way: first we will introduce the physical principles of optomechanical sensing, including a discussion of the noises and sensitivity of the systems, and then review the progress in displacement sensing, mass sensing, force sensing, atomic force microscope (AFM) and magnetic resonance force microscope (MRFM), accelerometry, magnetometry, and ultrasound sensing, and introduce the progress of using quantum techniques especially squeezed light to enhance the performance of the optomechanical sensors. Finally, we give a summary and outlook.
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Details

1 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100094, P. R. China; Songshan Lake Materials Laboratory, Dongguan 523808, Guangdong, P. R. China
2 State Key Laboratory of Low-Dimensional Quantum Physics, Tsinghua University, Beijing 100084, P. R. China
3 Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100094, P. R. China; University of Chinese Academy of Sciences, Beijing 100049, P. R. China
4 Songshan Lake Materials Laboratory, Dongguan 523808, Guangdong, P. R. China; Frontier Science Center for Quantum Information, Beijing 100084, P. R. China