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© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.

Abstract

Achieving a compound thin film with uniform thickness and high purity has always been a challenge in the applications concerning micro electro mechanical systems (MEMS). Controlling the adhesion force in micro/nanoscale is also critical. In the present study, a novel method for making a sputtering compound target is proposed for coating Ag–Au thin films with thicknesses of 120 and 500 nm on silicon substrates. The surface topography and adhesion forces of the samples were obtained using atomic force microscope (AFM). Rabinovich and Rumpf models were utilized to measure the adhesion force and compare the results with the obtained experimental values. It was found that the layer with a thickness of 500 nm has a lower adhesion force than the one with 120 nm thickness. The results further indicated that due to surface asperity radius, the adhesion achieved from the Rabinovich model was closer to the experimental values. This novel method for making a compound sputtering target has led to a lower adhesion force which can be useful for coating microgripper surfaces.

Details

Title
Theoretical and Experimental Analysis of Surface Roughness and Adhesion Forces of MEMS Surfaces Using a Novel Method for Making a Compound Sputtering Target
Author
Salehi, Majid 1   VIAFID ORCID Logo  ; Heidari, Pedram 1   VIAFID ORCID Logo  ; Ruhani, Behrooz 1   VIAFID ORCID Logo  ; Kheradmand, Amanj 2 ; Purcar, Violeta 3   VIAFID ORCID Logo  ; Căprărescu, Simona 4 

 Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad 8514143131, Iran; [email protected] (M.S.); [email protected] (P.H.); [email protected] (B.R.) 
 School of Engineering, Macquarie University, Sydney, NSW 2109, Australia; [email protected] 
 National Institute for Research & Development in Chemistry and Petrochemistry—ICECHIM, Splaiul Independentei no. 202, 6th District, 060021 Bucharest, Romania 
 Faculty of Applied Chemistry and Materials Science, Department of Inorganic Chemistry, Physical Chemistry and Electrochemistry, University Politehnica of Bucharest, Ghe. Polizu Street, no. 1-7, 011061 Bucharest, Romania; [email protected] 
First page
1551
Publication year
2021
Publication date
2021
Publisher
MDPI AG
e-ISSN
20796412
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2612763095
Copyright
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.