Abstract

A method of controlled generation of metal suboxide films is proposed, basing on low-current ion sputtering of native oxides of ultra-thin metallic films and XPS chemical and phase depth profiling. Niobium suboxide ultra-thin films are generated and controlled using this approach.

Details

Title
Controlled Ultra-Thin Suboxide Films Generation in Metal-Oxide Systems by Ar+ Ion Irradiation
Author
Lubenchenko, A V 1 ; Lukyantsev, D S 1 ; Pavolotsky, A B 2 ; Ivanov, D A 1 ; Lubenchenko, O I 1 ; Ivanova, I V 1 ; Iachuk, V A 1 ; Pavlov, O N 1 

1  National Research University “Moscow Power Engineering Institute”, Moscow, 111250, Russia 
2  Chalmers University of Technology, Göteborg, 41296, Sweden 
Publication year
2020
Publication date
Dec 2020
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
DOI
https://doi.org/10.1088/1742-6596/1695/1/012025
ProQuest document ID
2618602387
Copyright
© 2020. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.