Abstract

Aiming at the problem of hydrogen content exceeding the standard in GaAs device, the influence mechanism of hydrogen content exceeding the standard on the device is analyzed, the failure model of hydrogen content exceeding the standard in GaAs device in engineering is given, the source of hydrogen is analyzed, and the protective measures of hydrogen content exceeding the standard are given. It is of certain guiding significance for future engineering application.

Details

Title
Analysis on Influence of Hydrogen Content Exceeding Standard in GaAs Device
Author
Song, Yan 1 ; Wen, Ping 1 ; Hua, Xi 1 ; Zhao, Yang 1 ; Tang, Xu 1 ; Dong, Zuodian 1 

 Xi ‘an Branch of the Fifth Aerospace Institute , China 
First page
012006
Publication year
2022
Publication date
Jan 2022
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2635867602
Copyright
Published under licence by IOP Publishing Ltd. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.