Abstract

In this work, the surface modifications are studied of aluminium nitride (AlN) and silicon nitride (Si3N4) ceramics irradiated by nanosecond laser pulses. The laser processing is performed by a Nd:YAG laser system at four wavelengths - 266 nm, 355 nm, 532 nm, and 1064 nm. It is found that the average ablation rate per pulse is in the order of few hundreds of nanometers, as the laser treatment leads to the appearance of a variety of micro- and nanostructures on the surface of the material. In the case of AlN, a conductive layer is formed on the surface whose resistance can be modified by varying the processing conditions. Using a model based on the heat-conduction equation, the temperature evolution, ablation depth and temporal dynamics of the ablation process are followed.

Details

Title
Laser processing of nitride ceramics
Author
Nedyalkov, N 1 ; Dilova, T 2 ; Dikovska, A 1 ; Nikov, Ru 1 ; Ro Nikov 1 ; Koleva, M 1 ; Stankova, N 1 ; Daskalova, Al 1 ; Angelova, L 1 

 Institute of Electronics, Bulgarian Academy of Sciences , 72 Tsarigradsko Chaussee, 1784, Sofia , Bulgaria 
 Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences , bld. 11, Acad. Georgi Bonchev Str., 1113, Sofia , Bulgaria 
First page
012044
Publication year
2022
Publication date
Mar 2022
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2647395184
Copyright
Published under licence by IOP Publishing Ltd. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.