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Abstract
In this work, the surface modifications are studied of aluminium nitride (AlN) and silicon nitride (Si3N4) ceramics irradiated by nanosecond laser pulses. The laser processing is performed by a Nd:YAG laser system at four wavelengths - 266 nm, 355 nm, 532 nm, and 1064 nm. It is found that the average ablation rate per pulse is in the order of few hundreds of nanometers, as the laser treatment leads to the appearance of a variety of micro- and nanostructures on the surface of the material. In the case of AlN, a conductive layer is formed on the surface whose resistance can be modified by varying the processing conditions. Using a model based on the heat-conduction equation, the temperature evolution, ablation depth and temporal dynamics of the ablation process are followed.
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Details
1 Institute of Electronics, Bulgarian Academy of Sciences , 72 Tsarigradsko Chaussee, 1784, Sofia , Bulgaria
2 Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences , bld. 11, Acad. Georgi Bonchev Str., 1113, Sofia , Bulgaria