A study on MEMS oscillators‘ frequency drift of temperature

Abstract

The frequency output of oscillators is subject to a series of factors, such as working temperature, humidity, shock and vibration. Most of these factors are related to the manufacturing processes and packaging techniques employed in the semiconductor industry. Among the above factors, the influence of temperature is the most direct and most significant. And the effect of temperature on the frequency output of the oscillator is also called oscillators‘ frequency drift of temperature. This project aims to study frequency drift of two types of oscillators influenced by temperature, namely Quarts oscillators and MEMS oscillators. Firstly, the report states two types of oscillators‘ strength and weakness respectively. And then, referring to some industrial standards, the report also deceives and performs a series of tests to obtain data about the behavior of oscillators in different temperature. The experimental results show that the curve of the frequency-temperature of OCXO is approximately a horizontal line. And the curve of MEMS oscillator 1 looks like a capital letter M with relative small amplitude, and the curve of MEMS oscillator 2 is close to a slowly decreasing line. While the curve of crystal oscillator is a sine curve with steep rise at the end. According to the diagram, a conclusion that MEMS oscillators‘ frequency drift of temperature is less than that of crystal oscillators can be drawn naturally.