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© 2022 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.

Abstract

This paper presents an air bearing stage that uses flexure for yaw motion compensation. The proposed stage realizes motion in three degrees of freedom (DOF), which are the X, Y, and Θz directions. To work with Θz as the rotational motion of the stage, we applied a flexure consisting of four bar linkages. The stage from a previous study in which flexure is applied to compensate for yaw motion error has the limitation of increasing the structural stiffness of the stage due to the rotational stiffness. In this study, we propose a combination of a new stage structure and flexure to ensure the high structural stiffness of the stage and the very low rotational stiffness of the flexure at the same time. Modeling and design optimization were performed to apply adequate flexure to the proposed stage. Experiments were carried out to verify yaw motion error compensation and the performance of the stage. The proposed stage has a maximum yaw motion error of 0.86 arcsec during the scanning motion and 48 ms settling time, while the stepping motion is improved by 34.2% compared to the previous study.

Details

Title
Development of Air Bearing Stage Using Flexure for Yaw Motion Compensation
Author
Hak-Jun, Lee 1 ; Ahn, Dahoon 2   VIAFID ORCID Logo 

 Smart Manufacturing System R&D Department, Korea Institute of Industrial Technology, Cheonan-si 31056, Korea; [email protected] 
 Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, Seoul 01811, Korea 
First page
100
Publication year
2022
Publication date
2022
Publisher
MDPI AG
ISSN
20760825
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2652935387
Copyright
© 2022 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.