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Abstract
The paper presents some results of experimental studies of Mo/Si multilayer degradation under UV exposure from compressed plasma jets in air. Such high current plasma flows generate broadband powerful UV radiation fluxes. A single exposure caused a slight decrease of reflectivity from 0.54 to 0.47 due to the coating contamination by the debris from the plasma light emitter.
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1 Bauman Moscow State Technical University , 2-ya Baumanskaya 5, 105005, Moscow , Russia
2 Lebedev Physical Institute of the Russian Academy of Sciences , Leninskiy Avenue 53, 119991, Moscow , Russia
3 Industrial University of Santander , Carrera 27 #Calle 9, Bucaramanga 680002 , Colombia