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Abstract
The present work deals with the comparison of selected properties of WNx/TiSiN multilayer and respective WNx and TiSiN monolithic coatings that were deposited at the same parameters. The effect of the multilayer architecture on the structure and mechanical properties of WNx/TiSiN multilayer was studied in detail. The multilayers and monolayers were fabricated on high-speed steel substrates by unbalanced direct magnetron sputtering from W (purity 99.95 %) and Ti80Si20 (purity 99.50 %) targets. The chemical composition and the cross-sectional morphology of multilayer and single-layer coatings were characterized by scanning electron microscopy (SEM) equipped with wave-dispersive X-ray spectroscopy (WDS). The structure was analyzed by X-ray diffraction (XRD). The hardness and Young’s modulus of multilayer and coatings were investigated using the nanoindentation method. Results showed that the WNx/TiSiN multilayer, possessing cubic W and TiN phases and a dense layered microstructure, showed slightly improved hardness (28.5 ± 3.5 GPa) and HIT/EIT parameter (0.087), as compared with the WNx and TiSiN coatings. It has been shown that the design of multilayered structure of WNx/TiSiN coating is a promising way to tailor the microstructure and properties of the hard coatings.
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Details
1 Slovak University of Technology in Bratislava, Faculty of Materials Science and Technology in Trnava, Institute of Materials Science , Bottova 25, 917 24 Trnava , Slovakia
2 Slovak University of Technology in Bratislava, Faculty of Materials Science and Technology in Trnava , Institute of Production Technologies, Bottova 25, 917 24 Trnava , Slovakia
3 Sumy State University, Faculty of Electronics and Information Technologies, Department of Nanoelectronics and Surface Modification , Ryms’koho-Korsakova 2, 40007 Sumy , Ukraine
4 Staton, s.r.o., Department of Research and Development , Sadová 1148, 038 53 Turany , Slovakia
5 Comenius University in Bratislava, Faculty of Mathematics, Physics and Informatics, Department of Experimental Physics , Mlynská dolina F2, 842 48 Bratislava , Slovakia