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Cryogenic temperature deposition of high-performance CoFeB/MgO/CoFeB magnetic tunnel junctions on 300 mm wafers
Ichinose, Tomohiro; Yamamoto, Tatsuya; Nozaki, Takayuki; Yakushiji, Kay; Tamaru, Shingo; et al. arXiv.org, Jan 12, 2023.You might have access to this document
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