Abstract

The fabrication of three-dimensional (3D) nanostructures within optical materials is currently a highly sought-after capability. Achieving nanoscale structuring of media within its inner volume in 3D and with free design flexibility, high accuracy and precision is a development yet to be demonstrated. In this work, a 3D laser nanolithography technique is developed which allows producing mm-long hollow nanopores inside solid-state laser crystals and with a high degree of control of pore cross-sectional aspect ratio and size. We report an in-depth study on the formation of pores both within the non-thermal regime at which temperature is fast dissipated after each laser pulse, and for a thermally controlled regime using pulse-bursts which facilitate the formation of pores with highly circular shapes down to 1.1. We demonstrate this process for a wide range of speeds, pulse repetition rates and pulse energies, thus opening the door to a much more useful nanofabrication technique for nanophotonics. Finally, we also report the change in index of refraction that is produced at the nanoscale obtaining a positive index contrast of ∼3%. The work therefore provides a promising path towards reliable 3D nanostructuring of solid-state laser media for the flexible fabrication of large and complex structures with features sizes from the nanoscale up to the mm-scale. Moreover, due to the embedded, seamless, and monolithic nature of this technology, and since YAG crystals can sustain temperatures of up to 1900 °C and are highly chemically inert and erosion resistant, we anticipate its direct application in harsh environments.

Details

Title
Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose
Author
Paz-Buclatin, Franzette 1   VIAFID ORCID Logo  ; Esquivel-González, Marcos 1 ; Casasnovas-Melián, Alfredo 1 ; de Varona, Omar 2 ; Cairós, Carlos 3 ; Trujillo-Sevilla, Juan Manuel 4 ; Kamada, Kei 5 ; Yoshikawa, Akira 5 ; Rodríguez-Ramos, Jose Manuel 4 ; Martin, Leopoldo Luis 1 ; Ródenas, Airan 2 

 Department of Physics, Universidad de La Laguna, La Laguna, Spain 
 Department of Physics, Universidad de La Laguna, Avda. Astrofísico Francisco Sáncehez, S/N, Facultad de ciencias, La Laguna, Santa Cruz de Tenerife 38200, Spain 
 Departamento de Ciencias Medicas Basicas, Universidad de La Laguna, La Laguna, Spain 
 Wooptix SL, San Cristóbal de La Laguna, Spain 
 Tohoku University Institute for Materials Research, Sendai, Miyagi, Japan 
Pages
1511-1525
Publication year
2023
Publication date
2023
Publisher
Walter de Gruyter GmbH
ISSN
21928606
e-ISSN
21928614
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2805241724
Copyright
© 2023. This work is published under http://creativecommons.org/licenses/by/4.0 (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.