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Nanometer displacement measurement based on metrological self-mixing grating interferometer traceable to the pitch standard of one-dimension chromium self-traceable grating
Gu, Zhenjie; Xie, Zhangning; Chang, Zhikun; Xiao, Guangxu; Yin, Zhijun; et al. arXiv.org, Jun 25, 2023.You might have access to this document
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