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Title
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
Author
Hong, Hao 1 ; Wei, Jiangtao 2 ; Lei, Xin 3 ; Chen, Haiyun 4 ; Sarro, Pasqualina M. 5 ; Zhang, Guoqi 5 ; Liu, Zewen 2
1 Delft University of Technology, Department of Microelectronics, Delft, The Netherlands (GRID:grid.5292.c) (ISNI:0000 0001 2097 4740); Tsinghua University, School of Integrated Circuits, Beijing, China (GRID:grid.12527.33) (ISNI:0000 0001 0662 3178)
2 Tsinghua University, School of Integrated Circuits, Beijing, China (GRID:grid.12527.33) (ISNI:0000 0001 0662 3178)
3 Beihang University, School of Chemistry, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211)
4 Beijing Jiaotong University, School of Electronic and Information Engineering, Beijing, China (GRID:grid.181531.f) (ISNI:0000 0004 1789 9622)
5 Delft University of Technology, Department of Microelectronics, Delft, The Netherlands (GRID:grid.5292.c) (ISNI:0000 0001 2097 4740)
1 Delft University of Technology, Department of Microelectronics, Delft, The Netherlands (GRID:grid.5292.c) (ISNI:0000 0001 2097 4740); Tsinghua University, School of Integrated Circuits, Beijing, China (GRID:grid.12527.33) (ISNI:0000 0001 0662 3178)
2 Tsinghua University, School of Integrated Circuits, Beijing, China (GRID:grid.12527.33) (ISNI:0000 0001 0662 3178)
3 Beihang University, School of Chemistry, Beijing, China (GRID:grid.64939.31) (ISNI:0000 0000 9999 1211)
4 Beijing Jiaotong University, School of Electronic and Information Engineering, Beijing, China (GRID:grid.181531.f) (ISNI:0000 0004 1789 9622)
5 Delft University of Technology, Department of Microelectronics, Delft, The Netherlands (GRID:grid.5292.c) (ISNI:0000 0001 2097 4740)
Pages
98
Publication year
2023
Publication date
2023
ISSN
20961030
e-ISSN
20557434
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2841685283
Copyright
© The Author(s) 2023. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.