Matching Parameters for Vapor Deposition Process of Parylene C

Abstract

DSC and DTG curves of Parylene C were determined by 5K/min, 10K/min, 15K/min, and 20K/min heating rates. The optimal sublimation temperature, cleavage temperature, polymerization temperation and pressure were obtained via DSC/DTG curves, thermodynamic theory and quantum chemical theory. It was constructed that are the dimer sublimation, cleavage and polymerization models. The process parameters were matched for Parylene C through the sublimation, cleavage and polymerization rate computing. Subsequently, the experiments were conducted to prove it. The result shows that the efficiency of film formation has significantly raised, such as the film formation rate increasing by 57%, and the film formation time was reduced by more than 50%; The film purity was lowerd accordingly, the film quantity was significantly raised.