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Abstract
Thin-film lithium niobate is an attractive material for RF acoustic devices because of its high electromechanical coupling. However, due to the large coupling and the high anisotropy, thin-film lithium niobate resonators are prone to accidental resonances called spurious modes. These modes compromise the frequency response of the resonators, limiting their use in filter and oscillator applications. In this work, we present a novel method of spurious mode suppression through a special edge treatment etch process. Two thin-film lithium niobate resonators were fabricated, one with smooth sidewalls and one with the edge treatment. It was found that the edge-treated resonators show a weaker spurious mode response. This is potentially a new way to mitigate spurious resonances, a major issue in lithium niobate Lamb wave devices.
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Details
1 University of New Mexico (UNM), MSC01 04-2710, Center for High Technology Materials (CHTM), Albuquerque, USA (GRID:grid.266832.b) (ISNI:0000 0001 2188 8502); University of New Mexico (UNM), MSC01 04-2710, Optical Sciences and Engineering (OSE), Albuquerque, USA (GRID:grid.266832.b) (ISNI:0000 0001 2188 8502)
2 Sandia National Laboratories (SNL), Albuquerque, USA (GRID:grid.474520.0) (ISNI:0000 0001 2151 9272)
3 University of New Mexico (UNM), MSC01 04-2710, Center for High Technology Materials (CHTM), Albuquerque, USA (GRID:grid.266832.b) (ISNI:0000 0001 2188 8502); University of New Mexico (UNM), MSC01 04-2710, Optical Sciences and Engineering (OSE), Albuquerque, USA (GRID:grid.266832.b) (ISNI:0000 0001 2188 8502); University of New Mexico (UNM), MSC01 11001, Electrical and Computer Engineering (ECE), Albuquerque, USA (GRID:grid.266832.b) (ISNI:0000 0001 2188 8502)