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Abstract
In this study, for the first time, the optimization of applied pressure for achieving the one of the best tribological properties of diamond-like carbon (DLC) coating on graphite surface using plasma-enhanced chemical vapor deposition (PECVD) method was investigated. Raman spectroscopy and microscopy methods were used to characterize the applied coating. Additionally, the mechanical properties of the coating were investigated through nanoindentation testing. The wear resistance of coating has been tested as functional test. The results indicated that with increasing gas pressure, the sp3 hybridization percentage decreases, while the ID/IG ratio increases. The average roughness values for the uncoated sample and the coated samples at working pressures of 25, 30, and 35 mTorr were obtained as 1.6, 5.1, 3, and 2.4 nm, respectively. The results of hardness and wear tests showed that these properties were optimized by reducing the applied gas pressure. The highest hardness was 11.59 GPa, and the best sample in terms of the mechanical properties of the coating was the sample applied at a gas pressure of 25 mTorr. Results show that the optimal sample in tribological performance is the one applied at a working pressure of 25 mTorr. Because this sample demonstrates the lowest coefficient of friction, and wear depth.
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Details
1 Islamic Azad University, Department of Materials Engineering, Karaj Branch, Karaj, Iran (GRID:grid.411769.c) (ISNI:0000 0004 1756 1701)
2 Department of Semiconductors, Materials and Energy Research Center (MERC), Meshkindasht, Iran (GRID:grid.419477.8) (ISNI:0000 0004 0612 2009)