- Preview Available
- Scholarly Journal
Characterization of Silicon Nitride Thin Films on Glass
Simurka, Lukas; Erkan, Selen; Turutoglu, Tuncay.
Defect and Diffusion Forum; Zurich Vol. 368, (Jul 2016): 86-90.
DOI:10.4028/www.scientific.net/DDF.368.86
This is a limited preview of the full PDF
Try and log in through your library or institution to see if they have access.