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Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8
Li, Yu Ping; He, Chang De; Zhang, Juan Ting; Song, Jin Long; Zhang, Wen Dong
; et al.
Key Engineering Materials; Zurich Vol. 645-646, (May 2015): 577-582.
DOI:10.4028/www.scientific.net/KEM.645-646.577
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