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Abstract

Diamond-like carbon (DLC) films were deposited by microwave assisted chemical vapour deposition system using d.c. bias voltage ranging from −100 V to −300 V. These films were characterized by X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry techniques for estimating sp3/sp2 ratio. The sp3/sp2 ratio obtained by XPS is found to have an opposite trend to that obtained by spectroscopic ellipsometry. These results are explained using sub-plantation picture of DLC growth. Our results clearly indicate that the film is composed of two different layers, having entirely different properties in terms of void percentage and sp3/sp2 ratio. The upper layer is relatively thinner as compared to the bottom layer.

Details

Title
Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies
Author
Dey, R. M. 1 ; Pandey, M. 2 ; Bhattacharyya, D. 3 ; Patil, D. S. 4 ; Kulkarni, S. K. 1 

1  University of Pune, Department of Physics, Pune, India (GRID:grid.32056.32) (ISNI:0000000121909326) 
2  University of Pune, Department of Physics, Pune, India (GRID:grid.32056.32) (ISNI:0000000121909326); Bhabha Atomic Research Centre, Synchrotron Radiation Section, Mumbai, India (GRID:grid.418304.a) (ISNI:0000000106744228) 
3  University of Pune, Department of Physics, Pune, India (GRID:grid.32056.32) (ISNI:0000000121909326); Bhabha Atomic Research Centre, Spectroscopy Division, Mumbai, India (GRID:grid.418304.a) (ISNI:0000000106744228) 
4  University of Pune, Department of Physics, Pune, India (GRID:grid.32056.32) (ISNI:0000000121909326); Bhabha Atomic Research Centre, Laser and Plasma Technology Division, Mumbai, India (GRID:grid.418304.a) (ISNI:0000000106744228) 
Pages
541-546
Publication year
2007
Publication date
Dec 2007
Publisher
Springer Nature B.V.
ISSN
02504707
e-ISSN
09737669
Source type
Scholarly Journal
Language of publication
English
DOI
https://doi.org/10.1007/s12034-007-0084-8
ProQuest document ID
879642661
Copyright
© Indian Academy of Sciences 2007.