Abstract

TiO2 thin films were deposited by Spray Pyrolysis with thickness ((350±25) nm) onto glass substrates at (350°C), and the film was annealed at temperatures (400 and 500)°C. The structural and morphological properties of the thin films (TiO2) were investigated by X-ray diffraction, Field emission scanning electron microscopy and atomic force microscope. The gas sensor fabricated by evaporating aluminum electrodes using the annealed TiO2 thin films as an active material. The sensitivity of the sensors was determined by change the electrical resistance towards NO2 at different working temperatures (200 and 300)°C. It was determined that the fabricated sensor using TiO2 thin film annealed at (400)°C with 8.28 nm particle size has high sensitivity than the thin films annealed at 500°C with 10.37 nm particle size. The sensor operated at 200°C had also sensitive to the NO2 gas and its sensivity increased with operated temperatures at 300°C. It was observed that the fabricated sensors exhibited reproducible and stable results.

Details

Title
Employment of Titanium dioxide thin film on NO2 gas sensing
Author
Abbas, Israa Akram 1 ; Hazaa, Salah Q 2 ; Seham Hassan Salman 3 

 University of Mustansiriyah College of Education, Physics Department, Iraq - Baghdad 
 Al-Karkh University of Science, College of Science, Department of Medical Physics, Iraq - Baghdad 
 University of Baghdad, College of Education, Physics Department,Iraq - Baghdad 
Publication year
2021
Publication date
May 2021
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
2535687613
Copyright
© 2021. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.