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Exploration on the growth of Bi2O2Se films and nanosheet by an ALD-assisted CVD method
Yang, Jie; Jiang, Ruiqi; Chen, Chang; Chen, Junhui; Cao, Zixin
; et al.
Journal of Materials Science. Materials in Electronics; New York Vol. 34, Iss. 9, (Mar 2023): 788.
DOI:10.1007/s10854-023-10207-1
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