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Fabrication of Redistribution Layer (RDL) Based on AlN/Sodium Silicate Composite for TSV Interposers
Lu, Wen; Han, Jie; Luo, Jiang Bo; Ding, Gui Fu; Chen, Ran.
Applied Mechanics and Materials; Zurich Vol. 543-547, (Mar 2014): 3914-3917.
DOI:10.4028/www.scientific.net/AMM.543-547.3914
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