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Insights into MOCVD process control as revealed by laser interferometry
Insights into MOCVD process control as revealed by laser interferometryStafford, A; Irvine, S J C; Hess, K L; Bajaj, J.
Journal of Electronic Materials; Warrendale Vol. 28, Iss. 6, (Jun 1999): 712.
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Title
Insights into MOCVD process control as revealed by laser interferometry
Author
Stafford, A; Irvine, S J C; Hess, K L; Bajaj, J
Pages
712
Publication year
1999
Publication date
Jun 1999
ISSN
0361-5235
e-ISSN
1543-186X
Source type
Scholarly Journal
Language of publication
English
ProQuest document ID
204866408
Copyright
Copyright Minerals, Metals & Materials Society Jun 1999





