Content area
Full Text
(ProQuest: ... denotes formulae and/or non-US-ASCII text omitted; see image)
Features
Books
Used to make pressure sensors, microphones, accelerometers, and gyroscopes, microelectromechanical systems (MEMS) reached a global market of USD$12 billion in 2014, with an expected growth of 20% in the next four years. Future MEMS challenges will be strong price reduction coupled to system size shrinkage, thus the field heads toward the development of nanoelectromechanical (NEMS) systems. With these characteristics, it is easy to understand why MEMS are currently one of the most exciting topics on which to learn.
Current MEMS fabrication technologies rely on somewhat standard semiconductor device processing, although new technological prospects are envisaged to overcome the current limitations. This book is designed to give an overview of all these technologies.
The first chapter is a historical background of these systems taking...