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Non-traditional machining techniques for silicon wafers
Daud, Noor Dzulaikha; Hasan, Md. Nazibul; Saleh, Tanveer; Leow, Pei Ling; Mohamed Ali, Mohamed Sultan.
The International Journal of Advanced Manufacturing Technology; Heidelberg Vol. 121, Iss. 1-2, (Jul 2022): 29-57.
DOI:10.1007/s00170-022-09365-z
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