Abstract

Thin film resistive strain gauges using PdCr alloy as sensing material were fabricated on nickel-based alloy substrate, and evaluated for strain response, apparent strain and drift strain over a temperature range to 800 °C. The results indicated that the PdCr thin film strain gauge showed an excellent linear response to applied strain and stable gauge factor at different temperatures. The apparent strain can be estimated and compensated due to its repeatability and low value. The drift strain can be neglected until 600 °C. Even at 800 °C the drift strain can also be corrected since it drifted slightly and linearly. The repeatability of PdCr thin film strain gauge was also evaluated. It showed that the repeatable measurement error was 6.4%.

Details

Title
Preparation and evaluation of PdCr thin film resistive strain gauges
Author
Liu, Hao 1 ; Jiang, Shuwen 1 ; Jiang, Hongchuan 1 ; Zhao, Xiaohui 1 ; Zhang, Wanli 1 

1  State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, China 
Publication year
2017
Publication date
Dec 2017
Publisher
IOP Publishing
ISSN
17426588
e-ISSN
17426596
Source type
Scholarly Journal
Language of publication
English
DOI
https://doi.org/10.1088/1742-6596/939/1/012023
ProQuest document ID
2571912003
Copyright
© 2017. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.