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SEMICONDUCTORS CITING INCREASED global market demand, DuPont Fluoroproducts is expanding capacity for its Zyron electronic gas products. The company says that by the end of the first quarter of 2001 it will achieve a 500,000-pounds-per-year increase for Zyron 116 (C2F6, hexafluoroethane) chemical vapor deposition (CVD) chamber cleaning gas at its Chamber Works, N.J., site. Zyron 116 is also used as an etchant in semiconductor manufacturing.
Meanwhile, capacity for Zyron 8020 (C4F8, octafluorcyclobutane), introduced by DuPont this past June, will also be...