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Abstract

The TeraStar, designed for reticle defect and contamination inspection, features the same inspection and die-to-die/die-to-database inspection capabilities as the TeraScan. It can conduct simultaneously transmitted and reflected (STAR)light for contamination inspection at the same time as die-to-die pattern inspection for detection of pattern defects on the chrome surface of reticles, according to KLA-Tensor.

Details

Title
KLA-Tencor sows Tera
Author
Chappell, Jeff
Pages
6,60
Publication year
2000
Publication date
Sep 18, 2000
Publisher
Reed Business Information, a division of Reed Elsevier, Inc.
Website
http://www.electronicnews.com/
ISSN
10616624
Source type
Trade Journal
Language of publication
English
ProQuest document ID
209739410
Copyright
Copyright Cahners Business Information, a division of Reed Elsevier, Inc. Sep 18, 2000