Content area

Abstract

Palomar Technologies has introduced their 3500-II component assembly cell for MEMS packaging applications. Palomar's MEMS packaging system provides fivemicron accuracy placement in the X, Y and Z axes, and .2 milliradians in Theta axis, to meet the most stringent MEMS applications.

Details

Title
Palomar Technologies automates MEMS packaging
Author
Anonymous
Pages
12
Publication year
2002
Publication date
Oct 2002
Publisher
Reed Business Information, a division of Reed Elsevier, Inc.
Website
http://www.epp.com/
ISSN
00134945
e-ISSN
15582949
Source type
Trade Journal
Language of publication
English
ProQuest document ID
219304335
Copyright
Copyright Cahners Business Information, a division of Reed Elsevier, Inc. Oct 2002