Content area

Abstract

Standard for Definition and Measurement of Equipment Reliability, Availability and Maintainability (SEMI E10) contains keg definitions and formulas as well as confidence limit calculations to characterize semiconductor manufacturing equipment utilization. Integrating this document's standards into business practice lets purchasers and vendors clearly specify equipment reliability and maintainability.

Details

Title
SEMI E10--equipment reliability, availability and maintainability
Author
Dhudshia, Vallabh H
Pages
167-174
Publication year
1997
Publication date
Jun 1997
Publisher
Reed Business Information, a division of Reed Elsevier, Inc.
Website
http://www.semiconductor.net/
ISSN
01633767
Source type
Trade Journal
Language of publication
English
ProQuest document ID
209604206
Copyright
Copyright Cahners Magazine Division of Reed Publishing USA Jun 1997